DIFFRAC。XRR

DIFFRAC。XRRfeatures two different analysis approaches to best fit the user’s requirements:

• 快速傅里叶变换(FFT)方法，从x射线反射(XRR)曲线快速估计层厚度，只需单击一次鼠标。
• 利用动态散射理论，通过基于样本模型的拟合进行详细的XRR分析。

DIFFRAC。XRRis designed to maximize the user’s efficiency throughout the entire analysis process – from the creation of the sample model to the reporting of the results:

• 灵活的样本建模包括基于公式的参数和自由拟合变量。
• 材料和样品的全面和可扩展的数据库。
• 先进的自动化和工作流功能，包括宏记录和逐步执行。
• 自动分析和显示一系列反射率测量。
• 晶圆映射数据的评估，包括可定制的轮廓图和统计分析。
  
• 强大和广泛的报告生成器具有模板功能。
  

当分析任务是提取一个层的厚度时，则采用DIFFRAC方法。XRRsets the benchmark: With a single mouse-click, the Estimate tool evaluates the layer thicknesses via a Fast Fourier Transform and directly displays the result in the corresponding graph of the XRR measurement.

DIFFRAC。XRRfeatures a comprehensive and extendable material database. It includes amorphous and crystalline materials as well as mixed crystals up to quaternary compounds. The database offers calculation of structure factors or hkl patterns as well as X-ray properties like absorption, penetration depth, index of refraction, polarizability. To facilitate the creation of new database entries, .cif files and .str files can be directly imported.

DIFFRAC。XRRcomes with a powerful sample database.

可以创建、存储复杂的样本结构，然后直接加载到当前的分析项目中。这大大提高了日常工作的效率。

与测量软件DIFFRAC共享样本数据库。SUITE还允许更有效的实验计划，因此极大地支持DIFFRAC的PLAN.MEASURE.ANALYZE哲学。套件软件平台。

常规x射线反射率分析从未如此简单:DIFFRAC。XRRcan record macros and execute them in a single run or in a step-by-step mode.

工作流设计器为工作流的创建提供了一个直观的界面，该界面可以指导用户进行分析，甚至可以完全自动化地运行它——从导入度量数据到报告结果。

晶圆或区域映射允许确定样品的横向均匀性。

DIFFRAC。XRRfeatures full wafer analysis: Each refined sample parameter can be displayed as a contour, detailed statistics on the parameters can be displayed and sections along the surface allow for a detailed look at the local sample properties.